I can't know about intel's tech, of course, but I can read what they are saying: http://www.theregister.co.uk/2013/05/29/euv_lithography_stil... and where they are spending: http://spectrum.ieee.org/tech-talk/semiconductors/devices/in... I can't find a link now, but somewhere I've read from an intel guy they were expecting production runs in 2017.

It might be due to my limited scope of knowledge, but how would one scale E-beam to a production capacity anyways?

Thanks for the link. I'll have to cross-read it with a lot of info though since it's 'a bit' over my head. I'm already lost at 1D and how it relates to, well, anything. I still can't warp my head around 1D geometry.